@book{SchulzeKluthRuhnauetal.2015, author = {Christian Schulze and Sebastian Kluth and Mirko Ruhnau and J{\"o}rn H{\"u}belt}, title = {Ger{\"a}uschminderung von D{\"u}nnschichtbel{\"a}gen}, isbn = {978-3-95606-214-8}, year = {2015}, }